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- Airco Temescal Cv 8 Manual how to#
- Airco Temescal Cv 8 Manual manual#
- Airco Temescal Cv 8 Manual free#
Airco Temescal Cv 8 Manual manual#
Water valve turns on make sure the manual valve is turned on at the wall.Gate valve opens (Loud Noise!!) NEVER LEAVE THE ROOM UNTIL THE GATE VALVE HAS OPENED.Glow Discharge” turns off automatically.When vacuum drops below 1.0×10 -1, shown on the Chamber TC Meter, the Rough Valve & Mechanical Pump turns off.OPTIONAL: Press “Glow Discharge” switch To stop “Glow Discharge”- press & hold switch for 2 sec.Rough valve opens (after 4 second delay).Press “Pump Down” switch which automatically starts the following sequence:.Set up substrate and evaporation material and lower bell jar.
Airco Temescal Cv 8 Manual free#
TO LOWER: Turn and hold knob counterclockwise.īefore lowering the bell jar, make sure that the sealing O-ring is clean and free of obstruction clean the O-ring with a clean wipe and iso-propanol as required.TO RAISE: Turn and hold knob clockwise to desired height.Select up or down to raise or lower chamber only when vented (Interlocked to operate only when chamber is not under vacuum). pump temperature gauge is below 50 Kelvin) There is then a time delay of 2.5 hours before System Ready to use, that is, when Cryo.Cryogenic (Cryo.) Compressor turns on (after a 2 second delay).Mechanical pump & Foreline valve will close.After 10 – 15 minutes the vacuum should drop below 100mT.Foreline Valve opens (after a 2 second delay).Mechanical pump turns on and automatically performs the following steps.This procedure is normally not necessary and should only be done by the Cleanroom Engineer, unless instructed otherwise. Turn “System” power switch “ON”, Ion Gauge Controller “ ON “ (NB: do not turn on the ion gauge unless the thermocouple gauge for the main chamber indicates that the chamber is under vacuum), the Power cord to controls and E-Beam power supply are plugged in.The E-Beam supply cart along with the cryo pump compressor and mechanical pump are controlled by the micro processor in the control cabinet via remote contactor panel which are all located outside the cleanroom. The access panels on the sides of the cart are interlocked to cut power to E-Beam Gun and Thermal Resistance if any are removed. To the left of the chamber, is the knob for E-beam Gun turret, permitting selection of up to four sources and to the rear, the manual shutter control. Located on the right side of theĬhamber is the Thermal Resistance Heating power control Variac and this is interlocked to operate only when the chamber is under evaporation mode. The chamber hoist, contactor panel, Glow-Discharge transformer, Thermal Resistance Heating transformer and Electron Beam Gun transformer are also located on the cart. The chamber cart, situated next to the control cabinet, consists of a chamber backed by a CTI Cryo-Torr 8 pump and vacuum valve system. The automation allows users to operate the Evaporator 2000 with minimal training and is interlocked for system failsafe. The control cabinet houses a microprocessor, operation control panel, Ion and thermocouples gauges controller, Inficon Film thickness monitor, CTI Cryo pump temperature monitor, Airco CV8 Electron Beam control module and various other minor control electronics. The Evaporator 2000 system is an automated vacuum process control system for Physical Vapour Deposition (PVD) of metals, and non-metals, consisting of a control cabinet, chamber cart, E-Beam power supply cart, Cryo pump compressor cart and mechanical vacuum pump. This SOP is meant to be used by properly trained operators only. This is an Airco Temescal evaporator modified and automated by Doug Wong in 2000 and is commonly known in the AMPEL facility as the Evaporator 2000 system or the DeeWong Evaporator.
Airco Temescal Cv 8 Manual how to#
Purpose: To describe how to use the evaporator for Physical Vapor Deposition (PVD) by Electron Beam and Resistance Heating.
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00: David Webster, TRIUMF, October 22, 1993. Ebeam Evaporator Standard Operating Procedure – Revision 04